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MTI Corporation

Electric Conductive Diamond Film on Insulator(DCI), 5x5 mm , 2 um Thick,

Electric Conductive Diamond Film on Insulator(DCI), 5x5 mm , 2 um Thick,

Specifications:

  • Film:UNCD (Ultrananocrystalline Diamond)
  • Wafer Size: 5x5x0.5mm
  • Si wafer Orientation: (100) + / - 0.5o
  • Insulating Layer:  SiO2
  • Diamond film thickness:   2 micron, Oxide Layer: 1 micron
  • Resistivity:                         <0.1  ohm-cm
  • Surface Roughness:   as grown ,  RA < 10 nm
  • Package: One 1000 class clean room with 100 class plastic bag

MPN: FmDCI050505FT2umUS5

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