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MTI Corporation
Aluminium Film on Silicon Wafer , 3 microns / 4" -- Al-Si-100-3um ,Si(100) P-type B-doped R:1-20 ohm.cm
Aluminium Film on Silicon Wafer , 3 microns / 4" -- Al-Si-100-3um ,Si(100) P-type B-doped R:1-20 ohm.cm
Aluminium Metallic Film Specifications:
- Film-coated by E-beam evaporation under vacuum below 10-6 torr
- Evaporation rate: 0.2 manometer per second
- Aluminium Thickness: 3 microns
- Film Resistivity: 2.65 micro-ohm-cm
- Film Crystallinity: Weak (111) - oriented polycrystals
- Roughness, RMS: 4.87 nm and < 10 nm
Silicon Wafer Specifications:
- Conductive type: Si P- type, B-doped
- Resistivity: 1- 20 ohm-cm
- Size: 4" diameter +/- 0.5 mm x 0.525 +/- 0.025 mm th
- Orientation: (100) +/- 0.5o
- Polish: One side polished
- Surface roughness: Prime
- Packing: Vacuum packed on a 4" single wafer carrier
- Optional: you may need tool below to handle the wafer ( click picture to order )
MPN: FmAlonSiBa101D0525C1FT3umR1
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