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MTI Corporation

Diamond on Oxide Wafer(DOI), 5 mm x 5 mm, 2um Thick, 10nm Ra

Diamond on Oxide Wafer(DOI), 5 mm x 5 mm, 2um Thick, 10nm Ra

Specifications:

  • Film: UNCD (Ultra nanocrystalline Diamond)
  • Wafer Size: 5x5x0.5mm
  • Si wafer Orientation: (100) + / - 0.5o
  • Insulating Layer:  SiO2
  • Diamond film thickness:  2 microns, undoped
  • Oxide Layer: 1 micron
  • Estimated Resistivity: ~ 10E5 ohm-cm
  • Surface Roughness:   as grown ,  RA < 10 nm
  • Package: One 1000 class clean room with 100 class plastic bag

MPN: FmDOI050505FT2umUS5

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