MTI Corporation
Diamond on Oxide Wafer(DOI), 5 mm x 5 mm, 2um Thick, 10nm Ra
Diamond on Oxide Wafer(DOI), 5 mm x 5 mm, 2um Thick, 10nm Ra
Specifications:
- Film: UNCD (Ultra nanocrystalline Diamond)
- Wafer Size: 5x5x0.5mm
- Si wafer Orientation: (100) + / - 0.5o
- Insulating Layer: SiO2
- Diamond film thickness: 2 microns, undoped
- Oxide Layer: 1 micron
- Estimated Resistivity: ~ 10E5 ohm-cm
- Surface Roughness: as grown , RA < 10 nm
- Package: One 1000 class clean room with 100 class plastic bag
MPN: FmDOI050505FT2umUS5