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MTI Corporation
SiO2+Pt thin film on Si (B-doped)substrate ,10x10x0.5mm,1sp (SiO2=500nm, Pt=60nm)
SiO2+Pt thin film on Si (B-doped)substrate ,10x10x0.5mm,1sp (SiO2=500nm, Pt=60nm)
Specifications:
- Conductive type: SiO2+Pt thin film on Si (B-doped, (100)Ori.)
- Substrate ,10x10x0.5mm,1sp( SiO2=500nm,Pt=60nm)
- Resistivity: <0.005 ohm.cm (If you would like to measure the resistivity accurately, please order our Portable 4 Probe Resistivity Testing Instrument.)
- Size: 10x10 x 0.5 mm
- Polish: one side polished
- Surface roughness: < 5A
MPN: FmPt60SO500onSiBa101005S1
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