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MTI Corporation

SiO2+Pt thin film on Si (B-doped)substrate ,10x10x0.5mm,1sp (SiO2=500nm, Pt=60nm)

SiO2+Pt thin film on Si (B-doped)substrate ,10x10x0.5mm,1sp (SiO2=500nm, Pt=60nm)

Specifications:

  • Conductive type:       SiO2+Pt thin film on Si (B-doped, (100)Ori.)
  • Substrate ,10x10x0.5mm,1sp( SiO2=500nm,Pt=60nm)
  • Resistivity:                <0.005 ohm.cm   (If you would like to measure the resistivity accurately, please order our Portable 4 Probe Resistivity Testing Instrument.)
  • Size:                        10x10 x 0.5 mm
  • Polish:                      one side polished
  • Surface roughness:    < 5A

MPN: FmPt60SO500onSiBa101005S1
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