Undoped Aluminium Nitride (AlN) Template on 2" Silicon (Si <111> N type) 2"x 500 nm - FmAlNonSiPc50D05C1FT500nmUS

Aluminium Nitride (AlN) Template on Silicon is made by a PVDNC method. AlN template on Silicon is a cost effective way to replace AlN single crystal substrate.

Specifications

• Useful area: 90%
• Nominal AlN thickness: 200nm ±10%, one side coated, undoped AlN film
• Front Surface: <1nm RMS, as-grown
• Back surface: silicon N-type
• AlN orientation: C-plane (00.1)
• Macro Defect Density: <1/cm^2
• Wafer base: Silicon [111] N-type, 2" dia x 0.5 mm, one side polished

MPN: FmAlNonSiPc50D05C1FT500nmUS

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