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Undoped Aluminium Nitride (AlN) Template on 2" Silicon ( Si <111> , N type ) 2"x 200 nm - FmAlNonSiPc50D05C1FT200nmUS

Undoped Aluminium Nitride (AlN) Template on 2" Silicon ( Si <111> , N type ) 2"x 200 nm - FmAlNonSiPc50D05C1FT200nmUS

Aluminium Nitride (AlN) Template on Silicon is made by a PVDNC method. AlN template on Silicon is a cost effective way to replace AlN single crystal substrate.

Specifications

  • Useful area: 90%
  • Nominal AlN thickness: 200nm ±5%, one side coated, undoped AlN film
  • Front Surface: as-grown
  • Back surface: silicon as received
  • AlN orientation: C-plane (00.1)
  • Macro Defect Density: <5/cm^2
  • Wafer base: Silicon [111] N-type, 2" dia x 0.5 mm, Resistivity: <5 ohm-cm, one side polished

MPN: FmAlNonSiPc50D05C1FT200nmUS

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