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Undoped Aluminium Nitride (AlN) Template on 2" Silicon ( Si <111> , N type ) 2"x 200 nm - FmAlNonSiPc50D05C1FT200nmUS
Undoped Aluminium Nitride (AlN) Template on 2" Silicon ( Si <111> , N type ) 2"x 200 nm - FmAlNonSiPc50D05C1FT200nmUS
Aluminium Nitride (AlN) Template on Silicon is made by a PVDNC method. AlN template on Silicon is a cost effective way to replace AlN single crystal substrate.
Specifications
- Useful area: 90%
- Nominal AlN thickness: 200nm ±5%, one side coated, undoped AlN film
- Front Surface: as-grown
- Back surface: silicon as received
- AlN orientation: C-plane (00.1)
- Macro Defect Density: <5/cm^2
- Wafer base: Silicon [111] N-type, 2" dia x 0.5 mm, Resistivity: <5 ohm-cm, one side polished
MPN: FmAlNonSiPc50D05C1FT200nmUS
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