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Undoped Aluminium Nitride (AlN) Template on Silicon ( Si <111> P type ) 5mmx5mm x 200 nm - FmAlNonSiBc050505S1FT200nm

Undoped Aluminium Nitride (AlN) Template on Silicon ( Si <111> P type ) 5mmx5mm x 200 nm - FmAlNonSiBc050505S1FT200nm

AlN Template on Silicon is made by a PVDNC method. AlN template on Silicon is a cost effective way to replace AlN single crystal substrate.

Specifications:

  • Useful area: 90%
  • Nominal AlN thickness: 200nm ±10%, one side coated, undoped AlN film
  • Front Surface: <1nm RMS, as-grown
  • Back surface: silicon as received
  • AlN orientation: C-plane (00.1)
  • Macro Defect Density: <1/cm^2 
  • Wafer base: Silicon [111] P-type, 5 x 5 x 0.5 mm, one side polished

MPN: FmAlNonSiBc050505S1FT200nm

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