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Undoped Aluminium Nitride (AlN) Template on Silicon ( Si <111> P type ) 5mmx5mm x 200 nm - FmAlNonSiBc050505S1FT200nm
Undoped Aluminium Nitride (AlN) Template on Silicon ( Si <111> P type ) 5mmx5mm x 200 nm - FmAlNonSiBc050505S1FT200nm
AlN Template on Silicon is made by a PVDNC method. AlN template on Silicon is a cost effective way to replace AlN single crystal substrate.
Specifications:
- Useful area: 90%
- Nominal AlN thickness: 200nm ±10%, one side coated, undoped AlN film
- Front Surface: <1nm RMS, as-grown
- Back surface: silicon as received
- AlN orientation: C-plane (00.1)
- Macro Defect Density: <1/cm^2
- Wafer base: Silicon [111] P-type, 5 x 5 x 0.5 mm, one side polished
MPN: FmAlNonSiBc050505S1FT200nm
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