MTI Corporation
YBCO Thin Film 500nm ( two sides ) on Al2O3(R-plane), 3" dia.x0.5 mm,2sp - R76D05C2FT500US
YBCO Thin Film 500nm ( two sides ) on Al2O3(R-plane), 3" dia.x0.5 mm,2sp - R76D05C2FT500US
Main Specifications of HTS Film
Epitaxial thin Film Composition |
<100> YBCO YBa2Cu3Ox ( X= 6.7 -6.9 |
Film dimension both for one side or double side film |
YBCO / LaAlO3 10x10 mm ~ 3" dia. YBCO / LSAT 10x10 mm ~ 2" dia. YBCO / Al2O3 10x10 mm ~3" dia YBCO / STO 10x10 mm ~ 1" dia. |
Epitaxial FWHM |
< 0.2 o |
Critical Transition Temperature Tc |
90 K+/-5% |
Transition Temp. range ΔTc |
< 0.5 K |
Critical Current Jc |
2~3 MA/cm2 @ 77K 0T |
Surface Resistivity Rs |
< 1 m Ohm @ 10 GHz, 77K, 0T |
Thin film thickness |
100 ~ 500 nm |
Uniformity for 2" wafer |
Thickness 300-400nm Tc 86K-90K Jc 3 +/-0.5 MA/cm2 @ 80% wafer center. Note: |
Package |
Sealed in Vacuum in a plastic box and bag. |
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Double side 3" YBCO film on LaAlO3 Jc Uniformity measured FZK XRD pattern of Epi YBCO Film on LAO
Note: YBCO is very sensitive to moisture, and must be stored in desiccator box.
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