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MTI Corporation
Boron Nitride Film on Silicon Wafer
Boron Nitride Film on Silicon Wafer
Boron Nitride Film Specifications:
- BN Film coated by sputtering method
- The amorphous structure ( no orientation)
- Dielectric
- BN Thickness: 24 nm +/- 10%
- Purity: > 99.99%
Silicon Wafer Specifications:
- Conductive type: Si n-type
- Resistivity: 0.1-1.0 ohm-cm
- Size: 4" diameter +/- 0.5 mm x 0.525 +/- 0.025 mm ( thickness)
- Orientation: (100) +/- 0.5o
- Polish: One sides polished
- Surface roughness: Prime
- Packing: Vacuum packed on a 4" single wafer carrier box
MPN: FmBNonSia100D0525C1FT24nm
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